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Microspectrophotometer and Film Thickness Measurement MSP100 from Angstrom Sun Technologies

The MSP100 Microspectrophotometer and Thin Film Measurement System is used to characterize optical properties of thin films, thick coatings over a micron region area.

Microspectrophotometers are also called microreflectometer, micro-reflectometer, microspectrometer, microphotometer (Spectroscopic), microspectroscopic photometer etc. With unique design by Angstrom's professionals, the user can enjoy digital imaging capabilities with the MSP100 Microspectrophotometer featuring live video, powerful digital editing, measurement tools for reflection, transmission, absorption spectra. Data acquisition only takes milliseconds. TFProbe software allows user to set up heating stages or cooling stages for kinetic studies in real time for optical property changes such as reflectance, transmittance, coating thickness, refractive index (optical constants) etc.

Features

Features of the MSP100 Microspectrophotometer include:

  • Easy to operate with Window based software
  • Advanced DUV optics and rugged design for highest uptime and the best system performance
  • Array based detector system to ensure fast measurement
  • Affordable, portable and small footprint table top design
  • Measure film thickness and Refractive Index up to 5 layers over micron size region
  • Allow to acquire reflection, transmission and absorption spectra in milliseconds
  • Capable to be used for real time spectra, thickness, refractive index monitoring
  • System comes with comprehensive optical constants database and library
  • Advanced Software allows user to use either NK table, dispersion or composite model (EMA) for each individual film
  • Integrated Vision, spectrum, simulation, film thickness measurement system
  • Apply to many different type of substrates with different thickness up to 200mm size
  • Deep ultraviolet light allows to measure film thickness down to 20Å
  • 2D and 3D output graphics and user friendly data management interface
  • Advanced Imaging software for dimension measurement such as angle, distance, area, particle counting and more
  • Various options available to meet special applications

Applications

The MSP100 Microspectrophotometer is suited to use in:

  • Semiconductor fabrication (PR, Oxide, Nitride..)
  • Liquid crystal display (ITO, PR, Cell gap…..)
  • Forensics, Biological films and materials
  • Inks, Mineralogy, Pigments, Toners
  • Pharmaceuticals, Medial Devices
  • Optical coatings, TiO2, SiO2, Ta2O5…..
  • Semiconductor compounds
  • Functional films in MEMS/MOEMS
  • Amorphous, nano and crystalline Si

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