State of the art, bolt-on SIMS probe for integration into your existing UHV surface science chamber
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Static / Dynamic SIMS with energy analysis
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Integral front end ioniser for RGA
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Composition / contamination analysis
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Depth profiling
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Leak detection and desorbed gas analysis
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Compatible with Hiden SIMS Workstation
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Suitable for FIB-SIMS integration
Specification for 1000 Series EQS
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5x105 cps/nA for 27Al+ from Al target under 5keV Ar+ bombardment
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100 cps/nA for Cs(CsI)3+ at 913amu from CsI target under 5keV O2+ bombardment
The EQS secondary ion mass spectrometer for the analysis of secondary positive and negative ions from solid samples, featuring:
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High Sensitivity Pulse Ion Counting detector with 7 decade dynamic range.
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Raster Control for enhanced depth profiling and imaging with integrated signal gating.
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45° Electrostatic Sector analyser, scan energy at 0.05 eV increments/ 0.25eV FWHM.
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Minimum perturbation of ion flight path & constant ion transmission at all energies.
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Triple filter Quadrupole, mass options to 2500 amu.
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Penning Gauge and interlocks to provide over pressure protection.
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Differentially pumped option for use in high pressure environments.
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MASsoft control via RS232, RS485 or Ethernet LAN.
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Easily interfaced to existing systems