Amod Thin Film Deposition System from Angstrom Engineering

The Åmod line of thin film deposition tools was designed to meet the advanced process requirements of today’s thin film researcher. Angstrom Engineering's flagship line is fully customizable and can even be combined as part of a multi-system configuration. In-house developed control software smoothly integrates the various system components, keeping the right information at your fingertips.

Features

Features of the Åmod thin film deposition systems include:

  • Angstrom advanced PC based software system control
  • Aluminum or stainless steel chamber options
  • Custom designed to meet your process requirements
  • Support for multiple PVD processes
  • Glove box integration option
  • 1600mm x 1000mm system footprint
  • 475mm x 475mm x 500mm tall chamber with sliding and hinged door options
  • Aluminum or stainless steel chamber options
  • Custom designed to meet your process requirements
  • Support for multiple PVD processes
  • International input voltages available
  • Recipe based advanced multi-layer deposition control with user logon control
  • Sequential or co-deposition
  • Standard fixturing supports up to 300mm diameter please contact us for assistance with larger substrate sizes
  • Factory training included with every system
  • Our detailed training manual teaches new users how to operate and maintain the equipment
  • User safety is held paramount with features such as cutting power to sources when the chamber is open
  • 1-Year warranty with responsive and caring customer service
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