With the DualScope™ 95 SPM
scanner series, DME provides the
ultimate unification of ease of use and
performance. A decade's lasting experience
in the field of SPM
application and manufacturing are united
in the DS 95 SPM scanners to
help the user achieve the best and
most reliable results in the shortest
possible period of time.
- The compact design of the
DualScope™ 95 SPM scanner guarantees
outstanding stability and scan
- The unique plug and play cantilever
exchange secures fast and safe
operation of the instrument.
- An integrated optical axis in the
SPM scanner provides total visual
control during approach and positioning.
- The DualScope™ 95 SPM scanner
provides the facilities for all common
and advanced SPM modes.
- Integrated electronics in the scan
head guarantees lowest noise values
in electrical SPM modes.
- DualScope™ 95 multi mount allows
installation of the DualScope™ 95
SPM scanner into DME stages and
other facilities like nanoindenters,
optical microscopes, etc.
Since the DME Navigator 220™ was
released, the statement "You will
never again find this spot with your
AFM" is no longer true. The DME DS
95 Navigator 220™ enables to
investigate one and the same area
again even after removing the sample
from the AFM. Based on reference
structures the system finds the area
of interest with a precision better
The whole positioning
progress is full automatic and highly
stable and thereby perfect to
analyze multiple structural features
on a single sample in long term and
overnight measurement runs.
Compared to interferometer based
positioning systems the investment
effort is dramatically reduced by
providing a comparable
performance. The main application
areas are quality control of e-beam
lithography, lithography masks,
nanoimprints and analysis of
multistep pro-cesses like
functionalisation of surfaces, CNTs,
nano particles, growth of quantum
dots and thin layers/films etc.