The C11627-01 Optical NanoGauge available from Hamamatsu is a noncontact film thickness measurement device that uses spectral interferometry. The device includes an optical fiber as well as a main unit incorporating a mini-spectrometer, light source, and data analyzer within a small package.
The compact and space-saving design of the C11627-01 makes it easy to integrate in a customer's system. The C11627 effortlessly handles different types of measurement objects and materials. There are no complex reference measurements because the C11627-01 is reference free and offers high-speed and highly precise measurements that remain stable even after continuous use.
Key Features
The product features of the C11627-01 Optical NanoGauge are:
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Compact and saves space
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Reference free
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High accuracy and high speed
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Standalone operation with external units
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Analyzes optical constants (n, k)
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Easily handles height variations
Applications
The applications of the C11627-01 Optical NanoGauge are:
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Semiconductor material – thin film, wafer film
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Thickness/color measurement of FPD panel
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Coating film
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Plastic film