The Optical NanoGauge C10178-01 available from Hamamatsu is a film thickness measurement system that uses spectral interferometry. Using white light illumination, film thickness is recorded instantly and non-destructively. Spectral content of reflections from substrate interface and thin film surface are examined by curve fitting or Fast Fourier Transform methods. A photonic multichannel analyzer (PMA) is employed as a detector to calculate the spectral content with high accuracy and high sensitivity.
Key Features
The product features of the C10178-01 Optical NanoGauge are:
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Real time measurement
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High-speed and high-precise analysis
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Optical constant analysis
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Mapping function
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Data transfer with other equipment (Remote communication)
Applications
The applications of the C10178-01 Optical NanoGauge are:
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Semiconductor material – thin film, wafer film
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Thickness/color measurement of FPD panel
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Plastic film
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Coating film