FT-FS5000 Compression Tester from FemtoTools

The FT-FS5000 Compression Tester is a compact and self-contained metrological system designed for sophisticated micromechanical testing of samples where small forces need to be detected. The system can perform a wide range of different micromechanical testing principles such as:

  • Compression testing
  • Tensile testing
  • Bending testing
  • Creep testing
  • Cyclic testing

The FT-FS5000 Compression Tester contains a high-precision three-axis micropositioning unit with integrated high-resolution optical position encoders enabling, for example, pushing the microforcesensing probe against the sample, while recording its position and the applied force.The integrated camera/lens system visualizes the sample from above at a 45° angle. This allows for accurate alignment of the sensor relative to the sample as well as observation of the measurement procedure. The system is compatible with any of the FT-S Microforce Sensing Probes, enabling micromechanical testing ranging from 10 millinewtons down to 5 nanonewton.

Typical Application

  • Micromechanical MEMS testing
  • Stiffnessmeasurements onmicro-resonators
  • Electromechanical testing of micro-actuators (e.g. actuation-force, actuation-range)
  • Stiffness maps of pressure sensors
  • Cyclic or creep testing of e.g. polymer based MEMS structures

FT-FS5000 Compression Tester from FemtoTools

Self-contained metrology system for micromechanical testing.
FT-FS5000 Compression Tester used for wafer level micromechanical testing
FT-FS5000 Compression Tester used for force-deflection measurement of MEMS
FT-FS5000 Compression Tester used for force-deflection measurement of MEMS
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