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Evactron® CombiClean Desktop and In-Situ Plasma Cleaning System for SEM/FIB

The Evactron® CombiClean system features an integrated vacuum chamber for desktop cleaning samples and vacuum parts, and also an external plasma radical source for Evactron in-situ cleaning of E-beam instruments such as SEMs, FIBs, and other analytic instruments by removing carbon contamination. The VentDetect Evactron cleaning start process is enabled by a simple button push.

Key Features

The key features of the Evactron® CombiClean Desktop and In-Situ Plasma Cleaning System for SEM/FIB are:

  • VentDetect technology
  • Compatible with rotary vane pumps worrying about oil backstreaming
  • Dry Nitrogen purge feature keeps specimens clean after plasma cleaning
  • Storage mode enables continued dry nitrogen purging of samples while external
  • PRS is in use
  • System monitors operation of either PRS unit
  • Onboard control enables cleaning modes between internal and external PRS
  • with just the tip of a switch
  • Wide Pressure Range
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