Evactron® Model 25 RF Plasma Decontaminator for FIB/SEM and Vacuum Chambers

Evactron® Model 25 RF Plasma Decontaminator for FIB/SEM and Vacuum Chambers

The Evactron® 25 De-Contaminator can be used to remove atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25 De-Contaminator makes use of a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination. A simple button push enables the VentDetect™ Evactron Cleaning start process.

Key Features

The key features of the Evactron® Model 25 RF Plasma Decontaminator are:

  • Remove unwanted carbon contamination from your instrument
  • Easy setup and operation
  • Can be used on nearly all makes and models of electron microscopes
  • KF 40 vacuum mounting &ange, adapter &anges available
  • Wide Pressure Range
  • Free 5 year limited warranty
  • Start cleaning by using chamber vent and evacuation controls
  • Preset pressure, power and time settings from front panel or computer interface
  • Just use air for oxygen radicals, or use other gases for alternative plasma processes
  • Advanced plasma detection logic
  • Cleaning and error logs record use history and aid troubleshooting
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