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Combined AFM and WLI Profilometer – Dual Mode Atomic Force Microscope and 3D White Light Interferometer from Rtec Instruments

Rtec Instruments has designed a combination system that can accommodate white light interferometer and AFM on the same platform. The unit leverages the benefits of both AFM and interferometer and offers the highest resolution in XY and Z direction.

Samples are moved automatically between profilometer and AFM. The large XY stage helps in scanning small to large samples. Profilometer and AFM have independent Z stage.

White light interferometer module includes high quality objectives, multi color high intensity LED, 5 million pixel 3D image, and PSI and VLI modes.

TheAFM module features integrated high resolution video microscope, vibrating and non-vibrating modes plus phase and lateral force mode imaging, and linearized XY piezoelectric scanner. The module can accommodate standard AFM probes.

Key Features

The main features of the dual mode atomic force microscope and 3D white light interferometer are:

  • Integrated high resolution video microscope
  • Linearized XY piezoelectric scanner
  • Standard-sized AFM probes
  • Vibrating and non-vibrating modes plus phase and lateral force mode imaging
  • Uses a direct drive motorized probe approach
  • Multi color high intensity LED
  • High quality objectives
  • 5 million pixel 3D image
  • PSI and VLI modes
  • Low noise
  • Simple and intuitive control software
  • Unique algorithm and latest generation hardware

Applications

The applications of the dual mode atomic force microscope and 3D white light interferometer are:

  • Aerospace
  • Automotive
  • Cosmetic
  • Chemical
  • Polymer
  • Semiconductor
  • Paints and coatings

Specifications

The specifications of the dual mode atomic force microscope and 3D white light interferometer are provided in the table below:

           
Objective Magnification 50x 20x 10x 5x 2.5x
Numerical Aperture 0.55 0.40 0.30 0.13 0.075
Field of View (µm) 266 x 266 532 x 532 1064 x 1064 2128 x 2128 4256 x 4256
Spatial Sampling 0.14 0.28 0.55 1.1 2.2
Optical resolution 0.50 0.69 0.92 2.12 3.67
Working distance (mm) 0.50 4.7 7.4 9.3 10.3
Depth of focus @550nm 0.50 2.19 3.89 20.72 62.25
Degrees of maximum 22.6 9.5 4.8 2.4 1.2

 

Rtec Instruments AFM and Profilometer

Dual Mode 3D White Light Interferometer and AFM from Rtec Instruments
Dual Mode 3D White Light Interferometer and AFM from Rtec Instruments
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