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Automated Magnetron Deposition Coating System for Tools or Machine Parts – Caroline D12B1 from ESTO-Vacuum

ESTO has designed Caroline D12B1 system for magnetron deposition of decorative, hardening, and corrosion-resistant coatings on different kinds of parts, such as tools, shells, blades, etc. The system includes 20 rotary holders. Length of the processed parts should be less than 400mm and diameter should be less than 80mm.

The D12B1 system can be fitted with four pairs of magnetron units for any type of material sputtering from the target size of 400x100x6-15mm. Sputter deposition on the processed part is facilitated through planetary carousel substrate holders.

Key Features

The main features of the Caroline D12B1 system are:

  • Preheating of substrates and sustaining the substrates temperature throughout film deposition
  • Preliminary cleaning of DC ion source surface for enhanced adhesion of the sputtered films
  • Any magnetron target sputtering on controllable shutter
  • Gas consumption control and gas flow rate stabilization in each channel
  • Control of metal and resistive films deposition process based on the resistance of the piece of the substrate and deposition time
  • Full sputtering automation from loading to unloading of substrates
  • Vertical placement of substrates and targets on the drum
  • Easy-to-install substrates holders for fast loading and unloading operations
  • Rectangular chamber door allows for easy holders changing
  • Special hydraulic lift mechanism for easy maintenance of chamber equipment

Applications

The applications of the Caroline D12B1 system are:

  • Nanocomposite coatings deposition
  • Zirconium oxide layer deposition of thickness up to 100µm
  • Consequent metal nitride films deposition in the same technological process
  • Superlattices deposition
  • Silicon nitride and silicon dioxide-films deposition
  • Low-temperature decorative coatings deposition
  • Metal nitride-based 3D nanocomposite coatings deposition
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