Hitachi HD-2700 - FE-STEM with Spherical Aberration Correction – Hitachi HD-2700

The HD-2700 dedicated STEM features the Hitachi developed spherical aberration correction system that has excellent resolution and analytical sensitivity.

One can achieve a resolution of less than 0.1nm in dark-field SEM mode by correcting the spherical aberration. The HD-2700 is suitable for research and development and QC applications in semiconductors, material science and nanotechnology.

An increased 10x probe current of the HD-2700 enables high-speed, high-sensitivity EDX analysis (solid angle greater than 0.3sr). This enables quick acquisition of elemental distribution images even for elements at low concentrations. The HD-2700 column is compatible with Dual EDX detectors for ultra high sensitivity EDX analysis.

Electron energy loss spectrometry is also available for analyzing light elements with enhanced spatial resolution. Highly versatile imaging enables simultaneous multiple-image acquisition and display with a wide variety of combinations including SE/BF, SE/DF, BF/DF, DF/EDX and DF/EELS.

The HD-2700 uses the same simplicity of operation as the Hitachi HD-series, and the holders are compatible with the Hitachi FB and NB focused ion beam systems ensuring seamless operation and exchange between instruments.

Key Features

The key features of the Hitachi HD-2700 are:

  • Automatic image alignment function
  • Seamless solution from sample preparation to observation & analysis.
  • Holder compatibility with Hitachi FIB
  • Versatile evaluation and analysis function with various options
  • Simultaneous acquisition & display of SE and BF, SE and DF, BF and DF, DF/EDX mapping and DF/EELS mapping images
  • Low dose function - minimizing electron beam damage & contamination of specimen
  • High resolution STEM imaging, high-speed and high-sensitivity EDX analysis: Probe current x 10 times
  • Elemental mapping in a rapid timely manner
  • Low-concentration element detection and simplified operation
  • High precision magnification calibration and measurement
  • Live diffraction unit - simultaneous observation of DF-STEM image and diffraction pattern
  • Automatic tilt-series image acquisition function using 3D micro-pillar rotation holder (360°rotation)
  • ELV-3000 Real-time elemental mapping system (simultaneously acquired with DF-STEM image)
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