Ultra High Resolution Schottky Analytical FE-SEM – Hitachi SU-70

Ultra High Resolution Schottky Analytical FE-SEM – Hitachi SU-70

This latest SEM from Hitachi High Technologies can perform ultra-high resolution imaging along with several other analytical functions. This is in order to meet the demands of a new market trend which increasingly requires image observation at ultra-high resolution and a wide variety of analytical work together in one SEM.

The SU-70 is a new-concept SEM that includes Hitachi’s field-proven semi-in-lens technology and a new Schottky electron gun. It features not only ultra-high resolution (1.0 nm/15kV, 1.6nm*/l kV) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging derived from Hitachi’s highly reputed Super ExB filter technology.

Its new Schottky electron gun, which can produce probe currents in excess of 200 nA, enables a wide range of analytical capabilities at high throughput. The newly designed specimen chamber also enables simultaneous mounting of various detectors such as EDX, WDX, EBSP, STEM, BSE, CL. This versatile port design also provides the option for a cryogenic sample stage.

Key Features

The key features of Hitachi SU-70 are:

  • Ultra high resolution 1.0nm/15kV, 1.6nm/1kV
  • SE BSE signal control by Super ExB
  • Ultra-low accelerating voltage for shallow surface observation (*using deceleration mode)
  • Probe current 100 nA (attainable 200 nA)
  • EBSP analysis by field-free mode
  • Sample chamber designed for a wide range of analytical accessories

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