FEI V600FIB Focused Ion Beam (FIB) System

The V600 Family comprises the most efficient, flexible, and cost-effective circuit edit tools available for semiconductor labs. They enable fast, versatile modification and analysis with a single-column, focused ion beam (FIB) that effectively delivers high throughput circuit modification, cross-sectioning, and failure analysis. The V600 Family includes hardware and software extensions to address advanced circuit edit requirements below 65 nm, delivering the most cost-effective solutions for immediate and future requirements.

Advantages and Capabilities

Featuring FEI's most advanced 30 kV, 5 nm Sidewinder ion column, each member of the V600 Family is supremely capable of high-resolution imaging, milling, and quick access to subsurface features on a broad range of materials. Mid-column steering for low-voltage operations minimizes damage in TEM-sample lamellas while high-current operation ensures rapid material removal and increased sample throughput.

With its five-axis piezo stage, the V600FIB offers uncompromised tilt and cross-sectioning capabilities on a wide range of samples, from packaged parts to full 200mm wafers. An industry-recognized Windows-based operating system accommodates field-proven, xT-application-specific software, including Frame-Jump Navigation to minimize damage to your samples. With the V600FIB, you have the power to perform circuit modifications in a matter of hours, instead of days or weeks-which is the key to dramatically accelerated analysis and yield ramps in your lab. It also offers the next generation of flexibility and performance required for effective cross-sectioning, imaging, and transmission electron microscopy (TEM) sample preparation.


V600FIB is excellent performer for the following applications:

    • Circuit Edit
    • Failure Analysis
    • Defect Analysis
    • 3D Metrology
    • Materials and Sample Preparation
    • Nanoprototyping
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