Family comprises the most efficient, flexible, and cost-effective circuit
edit tools available for semiconductor labs. They enable fast, versatile modification
and analysis with a single-column, focused ion beam (FIB) that effectively delivers
high throughput circuit modification, cross-sectioning, and failure analysis.
The V600 Family includes hardware and software extensions to address advanced
circuit edit requirements below 65 nm, delivering the most cost-effective solutions
for immediate and future requirements.
Advantages and Capabilities
Featuring FEI's most advanced 30 kV, 5 nm Sidewinder ion column, each member
of the V600
Family is supremely capable of high-resolution imaging, milling, and quick
access to subsurface features on a broad range of materials. Mid-column steering
for low-voltage operations minimizes damage in TEM-sample lamellas while high-current
operation ensures rapid material removal and increased sample throughput.
With its five-axis piezo stage, the V600FIB
offers uncompromised tilt and cross-sectioning capabilities on a wide range
of samples, from packaged parts to full 200mm wafers. An industry-recognized
Windows-based operating system accommodates field-proven, xT-application-specific
software, including Frame-Jump Navigation to minimize damage to your samples.
With the V600FIB,
you have the power to perform circuit modifications in a matter of hours, instead
of days or weeks-which is the key to dramatically accelerated analysis and yield
ramps in your lab. It also offers the next generation of flexibility and performance
required for effective cross-sectioning, imaging, and transmission electron
microscopy (TEM) sample preparation.
is excellent performer for the following applications:
- SEMICONDUCTOR AND DATA STORAGE
- Circuit Edit
- Failure Analysis
- Defect Analysis
- 3D Metrology
- Materials and Sample Preparation