FEI V600FIB Focused Ion Beam (FIB) System

The V600 Family comprises the most efficient, flexible, and cost-effective circuit edit tools available for semiconductor labs. They enable fast, versatile modification and analysis with a single-column, focused ion beam (FIB) that effectively delivers high throughput circuit modification, cross-sectioning, and failure analysis. The V600 Family includes hardware and software extensions to address advanced circuit edit requirements below 65 nm, delivering the most cost-effective solutions for immediate and future requirements.

Advantages and Capabilities

Featuring FEI's most advanced 30 kV, 5 nm Sidewinder ion column, each member of the V600 Family is supremely capable of high-resolution imaging, milling, and quick access to subsurface features on a broad range of materials. Mid-column steering for low-voltage operations minimizes damage in TEM-sample lamellas while high-current operation ensures rapid material removal and increased sample throughput.

With its five-axis piezo stage, the V600FIB offers uncompromised tilt and cross-sectioning capabilities on a wide range of samples, from packaged parts to full 200mm wafers. An industry-recognized Windows-based operating system accommodates field-proven, xT-application-specific software, including Frame-Jump Navigation to minimize damage to your samples. With the V600FIB, you have the power to perform circuit modifications in a matter of hours, instead of days or weeks-which is the key to dramatically accelerated analysis and yield ramps in your lab. It also offers the next generation of flexibility and performance required for effective cross-sectioning, imaging, and transmission electron microscopy (TEM) sample preparation.

Applications

V600FIB is excellent performer for the following applications:

  • SEMICONDUCTOR AND DATA STORAGE
    • Circuit Edit
    • Failure Analysis
    • Defect Analysis
    • 3D Metrology
  • RESEARCH
    • Materials and Sample Preparation
    • Nanoprototyping
Ask A Question

Do you have a question you'd like to ask the manufacturer of this equipment or can you provide feedback regarding your use of this equipment?

Leave your feedback
Submit
Other Equipment by this Supplier
Other Equipment