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NanoGen Series for Nanoparticle Production by Mantis Deposition

The NanoGen sources produce nanoparticles by a "terminated gas condensation" method. The nanoparticles that result tend to posses one additional electronic charge and this allows them to be electrostatically manipulated either through deflection, focusing or acceleration.

The acceleration towards the substrate allows the particle impact energy to be controlled precisely. At low acceleration (<<1eV per atom) the particles soft-land without deformation. At higher energies they undergo a small degree of interface mixing and form a layer of bound nanoparticles. At very high energy, the particles fuse to revert to bulk material. Such nanoparticle manipulation produces a wide variety of coating morphologies from nanoparticle powder, through porous films to crystalline structures.

Key Features

The key features of the NanoGen Series are:

  • The NanoGen sources provide a high level control of nanoparticle generation by varying three main process components: aggregation length, gas pressure and the power density applied to the target.
  • The gas flow characteristics within the condensation zone ensure refinement of size distribution of the beam to allow precise definition of the particle size.
  • The sources can be supplied with user-selectable refinement zones to suit particular applications.
  • Nanoparticles can be generated with as few as 30 atoms up to those with diameters close to 20 nm.
  • The NanoGen50 source incorporates a 2" magnetron sputter source. The magnetron is based on the Mantis Deposition CUSP-2iU source and has all metal seals. The design ensures that the source is UHV compatible as well as robust.
  • The patented NanoGenTrio source has three coplanar targets, which can be driven independently. This allows deposition of complex alloy nanoparticles by precise gas flow control and rapid mixing of atomic vapour sputtered from different targets.
  • Nanoshell coater is comprised of a chamber and a linear magnetron source mounted at the top of it.

Applications

The applications of the NanoGen Series:

  • Thin-film Solar Cells
  • High-efficiency Photovoltaics
  • Gas Sensors
  • Catalysts
  • Semiconductors
  • Bio Coatings. 
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