Benchtop Critical Point Dryer Optimized for Large Wafer Samples – K850WM from Quorum Technologies

The K850WM is a compact bench-top instrument developed to critical point dry a complete 6"/150mm wafer. Rapid transfer is enabled by a convenient wafer holder and makes sure that pre-drying does not occur.

The K850WM includes a vertical chamber enabling top-loading of specimens. The top plate has a viewing port for specimen observation. The specimen exchange mechanism can be used simply and the specimen will remain under liquid during loading. The K850WM has an inbuilt heating and water cooling using the E4860 Recirculating Heater/Chiller. This combination offers a temperature control of +5°C cooling and +35°C during heating.

Key Features

The key features of the K850WM are:

  • 170mm diameter chamber - optimized for wafer/MEMS drying
  • Vertical chamber with top-loading and bottom draining - ensures specimens do not become uncovered during drying
  • Thermoelectric heating - accurate temperature control
  • Fine control needle valve pressure let down - precise control
  • Temperature monitoring and control with thermal cut-out protection
  • Pressure monitoring with safety cut-out for over pressure
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