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SMI500 Microscope System for Nanofabrication from SII NanoTechnology

Hakuto exhibited the “SMI500 Microscope System for Nanofabrication”, a new focused ion beam device from SII Nanotechnology, at the 2009 Micromachine/MEMS Exhibition.

A focused ion beam (FIB) device is a device that scans the surface of a sample using an ion beam that is narrowly focused to several nanometers, and with this type of device, microscopic observation on a nano level, etching, and deposition can be implemented with a single device. Microfabrication using a focused ion beam (FIB) enables unrestricted fabrication of shapes that combine curves and lines, and arbitrary shapes can be fabricated by reading bitmap data prepared by the user.

The main applications include cutting thin slices of samples for use in transition electron microscopes, changing the wiring of semiconductor devices, evaluating defects, and observing crystalline grains in metal materials.

Run time: 2.06 mins

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