PUMA Darkfield Patterned Wafer Inspectors from KLA Tencor
This video shows the PUMA family of laser imaging, darkfield patterned wafer inspectors from KLA Tencor. The high-speed wafer inspectors are highly sensitive, and have unique optical modes as well as multiple pixel options.
These laser-based optical inspection systems effectively disposition wafers and enhance the predictability of the chipmaking process by obtaining crucial defects at high production throughputs.
Run Time - 1:14min