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The MicroXAM 100 Surface Profilometer and Optical Interferometer from KLA Tencor

Jim Zobel from KLA Tencor demonstrates their MicroXAM 100 surface profilometer and white light optical interferometer. The MicroXAM 100 features fast data acquisition rates that enable calculation of such things as surface roughness, step heights and other surface features.

Line scans can be combined to produce 3-dimensional images and data. Furthermore, the instrument can also be used to test large samples making it ideal for non-destructive testing of real life components.

Run time - 3:03min

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