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DME BRR Microscope, a Hybrid AFM/SEM, Investigates Deep Holes with a High Aspect Ratio Tip from NanoWorld

High aspect ratio AFM tips allow investigation of deep trenches or holes. Anyway, investigating such structures is very challenging for the AFM as well as for the tip, because the Z axis of the AFM needs to react very fast in order not to cause any tip damages. This video shows an example of scanning a structure with deep holes using a NanoWorld AR5-NCHR tip.

The scanning has been performed by the DME BRR™, a hybrid SEM AFM system.

Run time: 3:39 min

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