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Celerity, Inc., a technology
leader in precision instruments and advanced gas and liquid delivery solutions
for the global semiconductor, solar and electronics industries, announced today
the introduction of its new GF100 series mass flow controller (MFC) designed
to precisely measure, monitor and control ultra high purity process gas chemistry
in semiconductor device and solar cell manufacturing processes. The new Celerity
GF100 series MFC is a highly configurable platform featuring Celerity's second
generation proprietary pressure transient insensitive flow technology, which
improves process control, reduces cost of ownership, and eliminates complexity
of inventory management.
The new Celerity GF100 series mass flow controller product family features
a number of key benefits including high accuracy, reproducible gas measurement,
control from advanced digital architecture, in situ electronic reconfiguration
of gas and flow range for maximum process flexibility and optimization, pressure
transient insensitive flow technology design (enables significant cost and size
reduction of high purity gas delivery systems), and intelligent embedded diagnostics,
service port and software for simple and efficient on-tool maintenance.
"Celerity is a market leader in advanced digital ultra high purity mass
flow controllers and an industry pioneer in pressure transient insensitive MFCs.
By leveraging our extensive experience in gas flow control, the GF100 series
is a continuous improvement update (CIP) of our market leading precision mass
flow controllers, providing customers with a seamless RoHS compliant upgrade
for enhanced process control and lower cost of ownership," said David Somo,
Celerity's Senior Vice President of Sales and Marketing.
Posted January 19th, 2009
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