Surface Technology Systems Sold Two ICP Systems to UNAM

Published on April 8, 2009 at 7:11 AM

Surface Technology Systems plc (STS), a leader in plasma process technologies for manufacturing MEMS and advanced semiconductor devices, today announced that they have sold two ICP systems to the UNAM, a new Institute of Materials Science and Nanotechnology, based at Bilkent University in Turkey. The Inductively Coupled Plasma (ICP) etch tools will be used for a wide range of applications including deep reactive ion etching (DRIE) of silicon, plus dielectric, compound semiconductor and metal etching.

Bilkent University is one of the most well regarded universities in Turkey for high technology and UNAM has been formed as the first national centre of excellence to lead nano/micro technology research, and will provide world-class facilities for users from all universities and research centres in Turkey.

Asst. Prof. Dr. Mehmet Bayindir, Assistant Director of UNAM stated, "We selected STS tools for our institute because not only are STS acknowledged market-leaders in DRIE of silicon, but their equipment offers very flexible processing capabilities for other materials that our researchers will be working with. STS has demonstrated an excellent depth of knowledge in a diverse range of etch applications."

Eizo Yasui, CEO of STS replied, "We are very happy to have placed STS tools in this national centre giving users from all over Turkey exposure to our technologies and equipment. We are looking forward to working with UNAM, as they establish themselves in the international nanotechnology research arena."

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