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AIXTRON Receives Order for MOCVD System from CAS

Published on June 2, 2009 at 3:42 AM

AIXTRON AG, a leading provider of deposition equipment to the semiconductor industry, announced today that the Institute of Semiconductors of The Chinese Academy of Sciences, located in Beijing, PR China, has placed an order for one Close Coupled Showerhead (CCS) 3x2 inch MOCVD system. Ordered in the first quarter and to be shipped in third quarter 2009, the new tool will be used for the research and development of semiconductor lasers and LEDs.

Prof. Zhu Hong Liang, Project Leader within the Key Laboratory of Semiconductor Materials Science, comments: “The Institute has focussed on optoelectronic device development for some years now. Having the world-class standard AIXTRON MOCVD system in our hands we have the means to undertake a complete materials development program. AIXTRON’s MOCVD equipment is well-known for its reliability and its straightforward operation. After a comparison with other suppliers we decided to buy the tool from AIXTRON because of its superior quality and excellent performance.”

The Institute of Semiconductors was founded in 1960 to meet the needs of the “National Twelve Years Plan of Scientific Development” where development of semiconductor science and technology was identified as one of “The Four Urgent Measures”. Since then it has become one of the most important bases for the R&D of semiconductor science and technology in China. The Institute was among the first of its kind in China authorized to offer master and doctoral degrees and to introduce postdoctoral research. Today it has over 420 staff including 64 professors and 66 associate professors. Building on its long tradition of scientific contributions to the development of Chinese semiconductor science and technology, the Institute is expected to make many more in the future.

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