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FRT Introduces New Optical Film Thickness Measuring Tool

Published on June 8, 2009 at 9:59 AM

FRT, a trusted partner for industry-proven metrological surface measuring systems, presents a new optical film thickness measuring tool at this year's Laser 2009 in Munich. The new MicroSpy FT non-destructively measures coatings that transparent or semi-transparent in the visible and near-infrared spectrum of light.

The easy to use film thickness measuring tool is cost-effective and powerful at the same time. With its innovative 3D film thickness mapping mode, the tool allows the thickness measurement of entire coating areas to visualize and evaluate the evenness of film thickness distribution as well as classical point and profile measurements on the coating. Furthermore, self-supported films such as foils, single films or stacked films on a substrate can be characterized. The tool is used in research and quality control of innovative products in the fields of medical-, semiconductor- and microsystem technology (MST) as well as in photovoltaics, optics and the automotive industry.

According to the given measurement task, the new FRT MicroSpy FT is equipped with a fast interferometric or reflectometric film thickness sensor. A selection of nine different sensor types with various light sources, measuring spot sizes and thickness measuring ranges offer great flexibility for the measurement of all kinds of coating materials and coating thicknesses from a few millimeters down to 10 nanometers.

The new tool is very easy to use with minimum training required. Its integrated CCD-camera with illumination provides a live camera picture of the measuring area directly in the software. Sample positioning is done with the click of a mouse button through a motorized precision table with a travel range of 50 mm x 50 mm. To put the sensor in perfect focus, FRT has included a high-precision z-axis with micrometer resolution that is usually found in only the very highest quality optical microscopes.

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