AIXTRON Receives Order for MOCVD tool from Fraunhofer Institute

Published on June 23, 2009 at 3:26 AM

AIXTRON AG today announced that in the fourth quarter 2008 the Fraunhofer Institute for Solar Energy Systems (ISE), Freiburg, Germany, ordered an AIX 2800G4-R MOCVD tool with automated wafer handler. The Planetary Reactor system with 8x6 inch configuration will be delivered in the fourth quarter 2009.

Funded by the BMBF and the Fraunhofer Society the new tool will form the centerpiece of a program to develop and produce next generation triple- and multi-junction solar cells in cooperation with industrial partners.

Dr Frank Dimroth, head of the III-V Epitaxy and Solar Cells group at the Fraunhofer ISE comments: “We selected an AIXTRON MOCVD system because of its high degree of flexibility and reproducibility that is achieved with the Planetary Reactor technology. Moreover we can employ the system’s wide process window for tuning our new process technology based on compound semiconductor alloy materials. The AIX 2800G4-R will incorporate advanced in-situ monitoring technologies and we will be able to change wafer configurations flexibly up to 8.5 inch. I was impressed by the improvements which have been made in the reactor design compared to our current AIX 2600G3 system. The new AIXTRON technology allows us to transfer our R&D processes up to high-volume mass-production which is a prime target for our development project.”

The Fraunhofer Institute for Solar Energy Systems (ISE) conducts research on the technology needed to supply energy efficiently and on an environmentally sound basis in industrialized, threshold and developing countries. To this end, it develops systems, components, materials and processes in the areas of the thermal use of solar energy, solar building, solar cells, electrical power supplies, chemical energy conversion, energy storage and the rational use of energy. The Institute's work ranges from fundamental scientific research relating to solar energy applications, through the development of production technology and prototypes, to the construction of demonstration systems. The Institute plans, advises and provides know-how and technical facilities as services.

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