Inc., a developer and manufacturer of specialized short-wavelength light
products for advanced technology applications, has been given an Outstanding
Contribution Award at the 2009 International Workshop for EUV Lithography, for
excellent performance of the Energetiq EUV light source and the company's contribution
to EUVL development. Only two awards were given at the Workshop held last week
in Honolulu, Hawaii -- the one to Energetiq and the other to a renowned professor
in EUV development for his lifetime career achievement.
Professor Gregory Denbeaux of the University at Albany presented the award
to Deborah Gustafson, VP of Marketing and Sales at Energetiq. Prof. Denbeaux
stated, "Energetiq has made it possible for researchers to have reliable
EUV photons to make EUV lithography become a reality. Much of today's research
is conducted with the Energetiq EUV light source."
Gustafson added, "Energetiq is pleased to receive this award and we are
happy that we can contribute to the infrastructure development being done today.
Moreover, we would like to thank all of our customers for their successful work
in this field. Energetiq plans to continue its contribution to the successful
implementation of EUV Lithography by working with the mask metrology suppliers
to ensure that there is a reliable EUV source for metrology tools."
Energetiq's EQ-10 Series EUV Light Source features the company's proprietary
Electrodeless Z-Pinch(TM) technology and produces stable EUV light, with low
cost of ownership. The electrodeless source design is proven to run continuously
and have highly repeatable performance. The EQ-10 Series is installed at major
EUV technology centers in the USA, Europe and Asia, and is used in advanced
photoresist testing and qualification, EUV optics testing, EUV microscopy, and
most recently with the introduction of a high repetition rate (10 kHz) version,
in metrology and research applications where simulation of HVM (High Volume
Manufacturing) is required.
Energetiq Technology, Inc. is a developer and manufacturer of advanced short
wavelength light products that enable nano-scale structures and products. The
Energetiq team combines its deep understanding of the high power plasma physics
needed for short wavelength light generation with its long experience in building
rugged, industrial and scientific products. The result is that users can expect
the highest levels of performance combined with the highest reliability.