SUSS MicroTec (FWB:SMH)(GER:SMH),
a leading supplier of innovative process and test solutions for the semiconductor
industry and related markets, announced today that it is engaging with one of
the world's leading research institutes, the Industrial Technology Research
Institute (ITRI) in Tawain, on the development of 3D integration technologies.
The Advanced Stacked-System Technology and Application Consortium (Ad-STAC),
a multinational research association led by ITRI, will implement the 300mm lithography
cluster LithoPack300 and the 300mm bond cluster CBC300 of SUSS MicroTec in its
300mm demo production line at ITRI in Hsin-Chu, Taiwan. With this SUSS MicroTec
is joining the consortium and will actively apply its expertise in 3D Integration
to further process development.
The Ad-STAC aims at driving technology advances for industrial development
in the field of 3D Integration. It consists of 12 multinational companies installing
the world's first 300mm demo-production line, targeting solely at 3D research
and development. This line provides state-of-the-art equipment and materials
for a wide range of processes. The facility which is open to all parties interested
in 3D development offers companies from different fields as well as research
institutes a unique environment to develop and test new technologies and products.
The 300mm wafer processing equipment of SUSS MicroTec joining the demo production
line represents the core solutions of the SUSS MicroTec 300mm portfolio. The
LithoPack300 integrates two latest generation 300mm photolithography modules,
the MA300 Gen2 mask aligner and the ACS300 Gen3 spray coater, in one system.
The CBC300 is a modular wafer bonding platform configured to run the latest
fusion bonding techniques with plasma activation, thermo compression bonding
including copper-to-copper (CuCu) bonds for 3D Integration. It offers temporary
bonding capability using the latest generation adhesives specifically designed
for the 3D applications.
“We are looking forward to SUSS MicroTec joining Ad-STAC,” noted
Dr. Ian Chan, VP & EOL General Director of ITRI. “SUSS MicroTec is
known as the leading expert in their field so I am confident that their experience
will become a real asset to the challenging environment of our demo production
“We are proud to have become part of this important alliance in ITRI's
Ad-STAC program,” stated Frank Averdung, CEO and President of SUSS MicroTec.
“We will be working with worldwide leading research and industry partners
on viable production platforms to enable cost efficient and high yielding manufacturing
processes. Being at the forefront of technology development we will be able
to directly pass our technology advancements on to our customers to shorten
the time to market for our customers' advanced products.”
SUSS MicroTec has recently released announcements on a range of research activities
on 3D integration technology development. An update about the latest advances
for challenging 3D integration processes will be provided in a workshop during
Semicon Taiwan, October 2, in Hsin-Chu, Taiwan. For further information please