Oxford
Instruments Plasma Technology (OIPT) has recently won a contract with French
research centre, STnano in Strasbourg, France for the supply of a Plasmalab
System80 Plus ICP system.
Oxford Instruments Plasma Technology's Plasmalab80 Plus ICP System
STnano is the new Strasbourg nanofabrication platform, established jointly
by IPCMS (a CNRS lab) and University of Strasbourg (UdS), and has expertise
in the design of nanostructures through topdown methods, and the study of their
magnetic properties.
Oxford Instruments' Plasmalab System80Plus system is a flexible, compact
and economical solution for plasma etching and deposition processes. STnano
has purchased the inductively coupled plasma (ICP) configuration, to process
multiple materials including Silicon etch. OIPT's Plasmalab System80Plus
is also available configured for etching and deposition (ICP-PECVD),reactive
ion etching (RIE), plasma etching (PE) or plasma enhanced chemical vapour deposition
(PECVD).
Dr. Hicham Majjad, Nanofabrication Manager at STnano, says that research centre
chose an Oxford Instruments tool as it fitted their research requirements. "As
a leading French research centre we demanded the highest specification system
we could find to fit the specifications for the work we are undertaking. The
Plasmalab80 Plus open load design allows for fast loading and unloading, ideal
for prototyping and low volume production environments such as ours. The system
has been bought as part of the STnano's programme to equip our cleanroom with
state of the art instrumentation for nano and micro scale fabrication in the
fields of molecular electronic, spintronic, and polymers."
"As world leaders in supplying etch tools to the Nano community, coupled
with our expertise in process technology, OIPT was able to offer STnano precisely
the System they were looking for," comments Mark Vosloo, Sales Director
at OIPT, "We pride ourselves on our experienced team of process engineers,
able to offer processes and techniques in order to support our customers exacting
requirements."