AIXTRON AG today announced
an order for one Close Coupled Showerhead (CCS) 6x2 inch MOCVD system from HRL
Laboratories LLC, based in Malibu, USA. The order was received in the third
quarter 2009 and the system will be delivered in the first quarter 2010.
The new system will be used to support HRL's work on advanced GaN technologies.
This includes growth of GaN HEMTs for millimeter-wave power applications and
high voltage gallium nitride (GaN) transistors for high efficiency power switching
A research staff member working on GaN at HRL comments: “We consider
the high standard of performance and engineering of AIXTRON’s CCS MOCVD
tools a perfect match for our needs. Among the practical aspects which suit
our applications are not only the low carrier gas consumption and overall efficient
materials utilization but also the ease of maintenance. The CCS system has a
proven track record thanks to the large number of systems installed worldwide
and we will appreciate the good scale-up potential that enables an easy recipe
transfer to a large system.
The AIXTRON system will provide a major augmentation to our GaN material growth
capabilities. For example, it will enable fabrication of more sophisticated
GaN HEMT structures as well as addressing our need for higher process throughput.”
HRL has become the leader in millimeter-wave GaN-based MMICs; amongst its reported
success is 500 mW of output power at 95 GHz for a GaN MMIC as presented at the
2008 CSIC conference.
HRL Laboratories is a corporate research-and-development laboratory specializing
in research into sensors and materials, information and systems sciences, applied
electromagnetics, and microelectronics. HRL provides custom research and development
and performs additional R&D contract services for its LLC member companies,
the U.S. government, and other commercial companies.