AIXTRON AG today announced
an order for a Black Magic CNT system from the leading Spanish Institute, Centro
Nacional de Microelectrónica (CNM), based in Barcelona, Spain. The order
was received in the third quarter 2009 and the system will be delivered in the
fourth quarter in the 4 inch wafer configuration. The system installation will
be performed by the AIXTRON support team.
The Black Magic tool will be used to produce CNT for various devices in development
including biosensors, gas sensors, NEMS, FET circuitry, AFM probes, energy harvesting
devices, low resistivity interconnections/contacts and thermal management materials.
Dr. Philippe Godignon, Grupo de Aplicaciones Biomédicas (GAB), Centro
de Investigación Nacional en Red en Bioingeniería, Biomateriales
y Nanomedicina (CIBER-BBN), comments: “We are looking forward to our new
Black Magic system. It was selected because it is ideal for a research centre
such as CNM with a large range of activities and targeted applications. The
AIXTRON tool offers excellent flexibility for all kinds of CNT growth on different
substrates and devices. Its wide temperature range and plasma enhanced capabilities
are adaptable not only to basic research but also to development work on more
standard technologies.
The Black Magic tool will complete our micro-nanotechnology facilities installed
in our 2,500 m2 clean room, alongside state-of-the-art equipment such as e-beam,
FIB, AFMs, nanoimprints, and CVD furnaces as well as a full CMOS/VDMOS fabrication
line which are currently used to develop next generation micro/nano devices
in the fields of biomedicine, environment, food, security, energy and transportation
applications.”