Inc. announced today that STMicroelectronics (ST), a leading semiconductor
manufacturer, has selected Applied Materials' high-k/metal gate (HKMG)
technology for the production of its 28nm logic devices. Applied's state-of-the-art
HKMG technology will be used to fabricate the critical transistor gate layers
in ST's next-generation system-on-chip devices at its facility in Crolles,
HKMG is an emerging technology that allows the continuation of Moore's
Law, enabling faster switching speed while reducing device power consumption.
Replacing traditional silicon dioxide as the main gate dielectric, the new HKMG
structure integrates a hafnium-based high-k material with a new metal gate electrode
to increase capacitance and control leakage current.
“We are impressed and extremely pleased with the speed at which Applied
has developed integrated high-k/metal gate solutions that address our 28nm device
requirements,” said Joël Hartmann, Silicon Technology Development
Director for STMicroelectronics in Crolles, France. “We are confident
that through our continued collaboration with Applied Materials we can quickly
bring our 28nm HKMG solution into volume production."
Major challenges to implementing HKMG technology for the industry have been
the development of manufacturable processes using new materials that can provide
optimum transistor characteristics while maintaining the integrity of the dielectric
stack. Applied has developed a multi-step process combining its leading-edge
technologies to provide ST with a robust and reliable HKMG solution. For more
information on Applied's HKMG technology, visit: www.appliedmaterials.com/products/Highk_MetalGate_4.html.
“This important collaboration with ST demonstrates that our high-k/metal
gate solution can be successfully integrated in their logic devices with superior
performance,” said Steve Ghanayem, Corporate Vice President and General
Manager of Applied's Front End and Metal Deposition Products business
unit. “ST's selection of our high-k/metal gate processes is a strong
testament to the work we've done to provide production-worthy solutions
for this challenging new transistor technology.”
Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in Nanomanufacturing
Technology™ solutions with a broad portfolio of innovative equipment,
service and software products for the fabrication of semiconductor chips, flat
panel displays, solar photovoltaic cells, flexible electronics and energy efficient
glass. At Applied Materials, we apply Nanomanufacturing Technology to improve
the way people live.