Site Sponsors
  • Park Systems - Manufacturer of a complete range of AFM solutions
  • Oxford Instruments Nanoanalysis - X-Max Large Area Analytical EDS SDD
  • Strem Chemicals - Nanomaterials for R&D

Heidelberg Instruments Receives Order Two Advanced VPG Maskless Lithography Systems from Asia

Published on December 18, 2009 at 6:32 AM

Heidelberg Instruments, GmbH, Heidelberg, Germany, a leading supplier of direct write laser lithography systems, announced order for two advanced VPG maskless lithography systems from an Asian based photomask production group.

These systems will have a write area of up to 800 mm by 800 mm and will be able to expose structures down to 1.0 µm, with an address grid of 50 nm.

“During the second half of 2009 we have seen a clear pick up in demand for production tools within the industry. We are very pleased that another leading Asian based photomask production firm has chosen the VPG system for its superior technology, throughput, along with its excellent reliability and quality.” states Alexander Forozan, Head of Global Sales and Business Development

About Heidelberg Instruments, GmbH: With an installation base in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Submit