Instrumente) L.P. introduces the new N-216 NEXLINE high-load piezo linear
motors. These ultra-precision nanopositioning actuators provide travel ranges
to 20 mm and push / pull forces to 600 N (130 lb).
The operating principle is based on coordinated motion of a number of highly
preloaded linear and shear piezo elements acting on a ceramic runner.
Features & Advantages
- All-Ceramic Drive, Extreme Lifetime, No Lubricants
- Direct Linear Motion, does not involve Rotation / Conversion
- Non-Magnetic and Vacuum & Clean room Compatible Working Principle
- Push / Pull Forces to 600 N /130 lbs
- High Holding Forces, to 800 N / 177 lbs (Power Off, No Heat Generation!)
- Travel Range 20 mm
- Resolution to 0.03 nm (30 Picometers)
- Self-Locking at Rest, No Heat Generation
Extreme Reliability, Virtually Unlimited Lifetime
NEXLINE® PiezoWalk® drives have many high-end applications from ultra-precision
manufacturing and semiconductor test equipment to astronomy and high energy
physics applications. They excel when tough requirements for lifetime, stability
, precision and force are paramount. The extreme reliability makes them ideal
for applications in difficult-to-access internals of instruments, where nanometer-realm
adjustment and / or vibration cancellation are required. To promote long lifetime,
the PiezoWalk® controller can reduce the operating voltage on the piezo
elements to zero at any position without affecting the full holding force (up
to 800 N, 177 lbs).
PiezoWalk® Working Principle Allows Different Operation Modes
The piezoceramic clamping and shear elements act directly on a moving runner
coupled to the load. For maximum velocity, and long distance movements, the
runner can be driven in full step mode. Extremely uniform motion and constant
velocity is achieved with the nanostepping mode. In addition to combining long
travel ranges with piezo-class precision, NEXLINE® PiezoWalk® drives
also offer a high-dynamics analog operation mode (100's of Hz) over smaller
distances (to 6 µm).
Open & Closed Loop Operation
N-216 linear motors come in two versions for open- or closed-loop operation,
as well as in two different load configurations. Closed-loop versions are equipped
with a linear encoder for direct position measurement of the moving runner.
The encoder features 5 nm resolution over the full travel range. In open-loop
operation a positioning resolution to 30 picometers can be realized by use of
the (high-dynamics) analog operation mode.
Choice of Controllers
NEXLINE® operation is supported by two motion controller models providing
different features. The (lower-cost) E-755 controller offers full functionality
for nanometer precise positioning. The E-712 supplies more sophisticated linearization
algorithms resulting in very smooth motion with highly constant velocity and
offers greater flexibility by nature of its modular design.
PI is a leading manufacturer of piezo systems, stages, linear motors &
precision motion-control equipment for microscopy, bio-nanotechnology, photonics
& semiconductor applications. The company has 4 decades of motion control
experience with OEM and research customers. PI was ISO 9001 certified in 1994
and is present worldwide with eight subsidiaries and a total staff of over 500.