Instruments Plasma Technology (OIPT) is pleased to announce improved end-pointing
capability on its range of plasma etch and deposition tools, with the introduction
of the CCD1 Spectrometer system. The CCD1 is capable of providing both a process
endpointing capability, and UV/VIS spectrum capture, and is available as a standard
option on all new tools or as an upgrade option for existing Oxford Instruments
This spectrometer provides a cost-effective route to general purpose endpointing
and spectroscopy, without compromising on resolution or signal strength.
The CCD1 is a UV/VIS CCD spectrometer that can monitor a wide range of plasma
emissions over wavelengths 200nm-880nm. This unit can be used in one of two
ways: process endpoint detection via OIPT’s PC2000™ software, or
full spectrum viewing and recording. This provides the user with detailed plasma
spectroscopy information, which can be used for monitoring the concentrations
of species within the plasma. The spectra can also be compared to previous spectral
data – for system monitoring, fault detection and potential fault classification.
Now available as a system option on new OIPT etch and deposition tools, the
CCD1 spectrometer may also be offered as an upgrade to systems in the field,
dependent on the system age, type, and configuration.