AIXTRON AG today announced
an order for one Black Magic CNT (carbon nanotube) deposition system from the
Delft University of Technology, Netherlands. The system is installed in a 1x4
inch wafer configuration in the Class 10,000 cleanroom of the Delft Institute
of Microsystems and Nanoelectronics (DIMES) at the Delft University of Technology.
Delft University of Technology evaluated various tools in terms of low temperature
deposition and system flexibility, before deciding upon AIXTRON's Black Magic
system. Professor Ryoichi Ishihara of the Faculty of Electrical Engineering,
Mathematics and Computer Science (EEMCS) at DIMES comments: "The Black
Magic system is a proven equipment for CNT growth. The system is flexible and
robust, offering a wide range of processing capabilities to enable us to produce
various types of CNT. These unique features attracted us for our research on
CNT growth and MEMS devices."
DIMES has established a world-leading reputation for its innovative achievements
in the field of “More than Moore” technology. The research institute
comprises several faculties within TU Delft and is well known for the high quality
of its researchers, highly experienced permanent technical staff and state of
the art equipment. DIMES is a well equipped institute with Class 100-10,000
cleanrooms, MEMS laboratory and Special Applications Laboratory, covering 1500m2
in area.