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LOT-Oriel Appointed as UK/Ireland Distributor for KLA Tencor Stylus and Optical Surface Profilers

Published on June 23, 2010 at 8:58 AM

LOT are proud to be recently appointed as the UK/Ireland distributor for KLA Tencor Stylus and Optical Surface Profilers.

The range includes:-

2D & 3D Stylus Profilers:

Alpha Step D-100 & Alpha Step D-120 Stylus Profilers

Entry level Stylus Profilers offering long scans up to 55mm, 0.03mg force control, with options for 1.2mm Z range, Stress Measurement & Stitching Software

Applications include:

  • Thin film stress
  • Biological
  • MEMS
  • 3D imaging
  • Material Characterization

P6+ P-16+ 3D Long Scan Advanced Stylus Profiler

High –End Stylus Profiler offering long scan (300mm), Wafer Stress Measurement & Pattern Recognition Mapping

Stylus Applications

  • Semiconductor - CMP monitoring and bump metrology
  • Material Science - Thin film thickness, roughness and stress analysis
  • Data Storage - Thin film head structure definition and disk edge roll-off
  • Optoelectronics - Microlens and diffuser shape
  • MEMS - Etch rates and trench depth analysis

Optical Profilers:

The Micro XAM-100 Optical Profiler

Fast Snap-shot measurement time with 250 micron Z range & options for auto mapping & auto stitching of images

Applications include:

  • Surface Texture
  • Precision step height
  • Surface form

Posted June 23rd, 2010

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