AIXTRON AG today announced
an order for its QXP-8300 ALD deposition tool from a major Taiwanese foundry.
The order is for a 300MM system for the deposition of next generation high-k
materials by Atomic Layer Deposition (ALD). The order was received in the first
quarter of 2010 and the system will be delivered in the second half of this
Dr. Sasangan Ramanathan, Chief Technical Officer at AIXTRON Inc., commented
that “This order validates the uniqueness of our patent protected TriJet
precursor delivery methodology for next generation high-k materials for high
The QXP-8300 drives the performance of ALD to the next level by exploiting
the proven expertise of showerhead and vaporization technologies developed by
AIXTRON over many years. The QXP-8300 combines IP protected innovations in both
these areas that will become more critical for successful chip manufacturing
in the increasingly challenging sub-30 nanometer generations devices.
According to Dr. Bernd Schulte, Chief Operation Officer at AIXTRON AG, “A
tool order from a Taiwan foundry not only validates technology but also the
mass-production pedigree of the QXP-8300. With the lowest CoO and CoC versus
all competing tools the QXP-8300 delivers a much needed solution to the technical
challenges of depositing advanced high-k materials without compromising on productivity.”
With strong interest emerging globally from major global chip manufacturers
Dr. Schulte further commented that “AIXTRON is particularly pleased that
we have seen more and more customers very keen to utilize the TriJet technology
and QXP-8300 platform for next generation DRAM capacitor and Flash applications.”
The term TriJet® is a registered trademark.