Nanonex launches new
NX-2600 tool which combines full wafer nanoimprinter and photolithography aligner
to offer sub-5 nm imprinting resolution and sub-1 micrometer alignment accuracy.
Nanonex Corporation, the inventor and world's leading provider in nanoimprint
lithography solutions with the longest history, is proud to launch its new Nanonex
NX-2600 tool for supporting the cutting edge nano-/micro-technologies.
NX-2600
The Nanonex NX-2600 is a full wafer nanoimprinter and photolithography aligner.
It is capable of all imprint forms: thermal, photo-curable, embossing and photolithography,
with sub-5nm imprinting resolution and sub-1 micrometer alignment accuracy.
Based on the Nanonex unique patented Air Cushion PressTM technology, the NX-2600
offers unsurpassed uniformity regardless of backside topology, wafer or mask
flatness, or backside contamination. This ACP technology also eliminates lateral
shifting between the mask and substrate, which significantly increases mask
lifetime.
Nanonex has successfully delivered the NX-2600 tools to Wright-Patterson Laboratory,
University of Massachusetts at Lowell and University of Cincinnati. The multifunctional
NX-2600 will be used to support the cutting edge nano-/micro-technologies research
and development at these top tier research laboratories.
Nanonex Corporation is the inventor of “nanoimprint lithography”,
the world’s first nanoimprint lithography company, and the world’s
leading provider of nanoimprint solutions that include equipment, masks, resists
and processes. Nanonex’s patented and proprietary nanoimprint lithography
(NIL) solutions and Air-Cushion PressTM can manufacture 3D nanostructures with
sub-5 nm resolution, large-area uniformity, accurate overlay alignment, high
throughput, and low cost. Nanonex NIL solutions have been adopted by a broad
spectrum of industry applications, such as optical devices, data storage, displays,
light emitting diodes, semiconductor ICs, biotech, chemical synthesis, and advanced
materials. Nanonex has over 100 customers and an installed base of more than
50 tools world-wide.