Nova’s Metrology Solutions Chosen for 11 and 14 nm Technology Node Development

Published on January 12, 2012 at 1:49 AM

By Cameron Chai

Nova Measuring Instruments has declared that its metrology and software solutions have been chosen by a major logic manufacturer to support the development of 11 and 14 nm process technology nodes and upcoming production.

The logic manufacturer has selected Nova Measuring Instruments for its most sophisticated standalone metrology instruments and software modeling platform. Its order covers NovaT600 standalone metrology tool and complete NovaMars modeling platform solutions, including several Mars developer licenses. Its future production includes front-end-of-line and back-end-of-line applications for CMP, etch litho processes.

The selection of Nova Measuring Instruments was based on a competitive evaluation. The company provides integrated metrology solutions and advanced standalone metrology tools to the semiconductor process control market. The shipment of the ordered tools is scheduled to be delivered in the first half of the fiscal year 2012.

The President and Chief Executive Officer at Nova Measuring Instruments, Gabi Seligsohn stated that the company is happy about this important order received from one of its most strategic clients. The wide acceptance of NovaT600 standalone metrology tool as well as NovaMars by top research institutes and customers is a testament of the company’s technological dominance, he added.

Seligsohn further said that the customer intends to use the NovaMars development package for enabling synchronized work of several development engineers. The company’s optical CD solutions are helpful in developing sophisticated processes for the 1X and 2X process technology nodes, he added.

Source: http://www.nova.co.il

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