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CEA-Leti Programs Extend 193nm Immersion Lithography for 1X Nodes

Published on July 10, 2013 at 5:55 AM

CEA-Leti said today that its multi-partner programs, IDEAL and IMAGINE, have demonstrated cost-effective solutions that extend 193nm immersion lithography for 1X nodes for critical levels such as contact and via, and for the cut layer, when multi-patterning is used.

Leti and Arkema launched the IDEAL program in 2011 to develop lithography techniques based on nanostructured polymers, using 300mm directed self-assembly (DSA) process and material solutions for 1X nodes. The partners, which include Sokudo, Tokyo Electron, STMicroelectronics and advanced academic laboratories, such as LTM and LCPO, have demonstrated DSA resolution capability down to sub-10nm half-pitch.

“IDEAL is addressing the limits of conventional optical lithography with a technological solution that offers potential cost-reduction opportunities,” said Serge Tedesco, Leti’s lithography program manager. Self-assembly lithography with block copolymer is a highly promising complementary technology due to its low manufacturing costs and its straightforward integration in existing device-manufacturing processes.”

The collaboration also recently completed DSA process integration in Leti’s 300mm pilot line and new specific modules have been implemented in the 300mm Sokudo DUO Track for coating, baking and PMMA removal, one of the key steps in DSA process implementation.

IMAGINE, a multiple electron-beam-lithography R&D program with a dozen partners, is focused on developing maskless lithography (ML2) based on MAPPER Lithography tools for high throughput.

The IMAGINE program this year will interface a 1,300-electron-beam tool (Matrix platform) with the Sokudo 300mm DUO Track, targeting a throughput of one wafer per hour. That will be followed by a 13,000-beam system producing a throughput of 10 wafers per hour in early 2015. The longer-term goal is a cluster of 10 modules allowing a throughput of 100 wph to support 1Xnm logic-nodes production.

Launched as a three-year project in 2009, IMAGINE was extended for four years in 2012. Besides Leti and MAPPER, the program also includes TSMC, STMicroelectronics, Nissan Chemical, TOK, Dow, JSR Micro, Sokudo, TEL, Mentor Graphics and Aselta Nanographics.

“These concrete results clearly show the industry that DSA and ML2 can extend 193nm immersion lithography by providing cost-effective solutions for critical-layer patterning,” Tedesco said. “They also demonstrate the value of combining the broad and deep technological strengths of Leti, MAPPER, Arkema, and all our partners in programs focused on meeting the demands at 1X nodes.”

About CEA-Leti
Leti is an institute of CEA, a French research-and-technology organization with activities in energy, IT, healthcare, defence and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics. NEMS and MEMS are at the core of its activities. An anchor of the MINATEC campus, CEA-Leti operates 8,000-m² of state-of-the-art clean room space on 200mm and 300mm wafer platforms. It employs 1,700 scientists and engineers including 320 Ph.D. students and 200 assignees from partner companies. CEA-Leti owns more than 2,200 patent families.
For more information, visit www.leti.fr.

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