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Park Systems Launch QuickStep SCM for Accurate, High Throughput Dopant Profiling for Semiconductors

Published on November 29, 2013 at 4:17 AM

Park Systems, world leader in atomic force microscopy (AFM) for the semiconductor and hard disk markets introduces QuickStep SCM, the newest technology for high throughput in scanning capacitance microscopy (SCM).

QuickStep SCM resolving dopant concentration in less than an order of magnitude levels.

Designed to work with Park NX AFM series, the leading AFM products for researchers and engineers in the semiconductor industry, Park’s QuickStep SCM provides accurate dopant profiles of semiconductor device structures, 5 to 10 times faster than any other competing SCM atomic force microscopy systems.

Park’s scanning capacitance microscope offers outstanding features to guarantee optimum results and is designed to offer an unsurpassed signal-to-noise ratio. Unlike others, doping concentration of less than an order of magnitude is easily and clearly distinguishable with our new SCM module.

Additionally,Park’s QuickStep SCM is designed to provide the fastest scan speed without compromising signal sensitivity, spatial resolution or data accuracy. For device characterization, scanning capacitance microscopy (SCM) provides the unique ability to measure quantitative 2D dopant profiles.

"Park designed the new SCM feature because in semiconductor manufacturing, the ability to characterize the dopant profile is a critical factor in identifying causes of failure as well as in making design advancements," explains Ryan Yoo, Vice President Global Sales & Marketing Park Systems. "Our design team has created an SCM that outperforms any on the market, dramatically increasing the throughput of the SCM measurement by as much as ten times, while maintaining high signal sensitivity, spatial resolution and data accuracy. Park's newly designed SCM detector suppresses detector noise level to maintain a high signal-to-noise ratio, giving it the best throughput in the industry."

QuickStep SCM differs from conventional methodology of slow continuous movement to XY scanner stopping at each pixel point to record the data then moving rapidly to the next xt measurement points. This speeds up the scan rate while maintaining high accuracy and integrity of the measurements. Park SCM achieves the best signal-to-noise ratio in the industry by automatically selecting the best RF frequency to match the doping range of sample over a wide RF band from 890 to 1050MHz, even when using low AC bias voltages.

About Park Systems

Park Systems is a leading manufacturer of atomic force microscopy (AFM) systems with a complete range of products for researchers and industry engineers in materials science, chemistry, physics, life sciences, semiconductor and data storage industries. Park’s products are used by over a thousand of institutions worldwide.

Park’s AFM features a unique patented set of technologies that yields the highest data accuracy at nanoscale resolution, superior productivity and ease of use, and lowest operating costs. Park Systems, Inc. is headquartered in Santa Clara, California with its global manufacturing, and R&D headquarters in Korea.

Park’s products are sold and supported worldwide with regional headquarters in the US, Korea, Japan, and Singapore, and distribution partners throughout Europe, Asia, and America. Please visit www.parkafm.com or call 408-986-1110 for more information.

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