Posted in | Nanolithography

New Projection Scanner Platform for Advanced Packaging from SUSS MicroTec

Published on March 5, 2014 at 1:03 AM

SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, has launched the DSC300 Gen2 projection scanner today. SUSS MicroTec's DSC300 platform for wafer sizes up to 300 mm is based on the projection lithography technology developed by SUSS MicroTec Photonic Systems Inc. (formerly Tamarack Scientific).

The system combines the advantages of full-field exposure and conventional projection lithography. Equipped with a full-field mask and broadband projection optics, the scanner exposes the substrate in a single continuous mode (scanning). Additional functions can be integrated in designing the mask layout, for example exposure of substrate edges - an important requirement for subsequent process steps.

The new projection scanner platform has been enhanced with improvements and new features to meet the latest overlay, resolution and automation requirements of emerging advanced packaging applications like Cu pillar bumping and WLCSP. With both, the DSC300 Gen2 and the Mask Aligner MA300 Gen2, SUSS MicroTec offers now two complementary lithography technologies that allow the optimization of cost of ownership and patterning performance.

"Following the acquisition of Tamarack Scientific in 2012, we have optimized the product portfolio, focused the business on the most promising applications and have systematically reengineered the tools to support volume production.", says Frank P. Averdung, President and CEO of SUSS MicroTec. "The 2nd generation of the projection scanner DSC300 is another step to expand the product portfolio of SUSS MicroTec Photonic Systems."

About SUSS MicroTec

SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany.

Source: http://www.suss.com/

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