The Advanced Mask Technology Center
GmbH & Co. KG (AMTC) has awarded the title
“Supplier of the Year” to Vistec
Semiconductor Systems GmbH. Vistec scored highest in a
Supplier Evaluation conducted by AMTC from June 2005 through November
2006.
In its Supplier Evaluation System (SES), officially introduced
in 2006, the AMTC evaluated 13 tool vendors, three software providers,
and one blank supplier. The business partners were rated in the
categories Purchasing, Engineering, Technology,
Environment/Security/Health and Management Profile. On the basis of a
gap analysis AMTC’s expectations of the individual suppliers
were matched against the actual outcome, resulting in a catalogue of
measures negotiated between the AMTC and each supplier to improve weak
points identified through the SES.
Vistec Semiconductor Systems GmbH supplies AMTC with metrology
tools which are used to measure the position of structures on a
photomask. The latest metrology tool delivered to AMTC features a
measurement accuracy of 3 nm and was qualified at AMTC for 2.3 nm even.
"Vistec is honored to receive AMTC’s recognition for
our mask metrology solutions. This award confirms the success
of our long-term collaboration with AMTC. We are looking forward to
working together on developing the next tool generation with further
improved measurement performance," stated Gerhard Ruppik, General
Manager of Vistec Semiconductor Systems. "Close collaboration with our
customers assures we can supply innovative solutions for upcoming
technology nodes."
Tokyo Electron Ltd. and the KLA-Tencor Corporation, supplying
Developing and Inspection tools respectively, came second and third in
the ranking.