Keithley Instruments, Inc.
a leader in solutions for emerging measurement needs,
announces a new C-V measurement instrument for its powerful Model
4200-SCS Semiconductor Characterization System. The Model 4200-CVU
instrument comes as a module that plugs into any available instrument
slot of the Model 4200-SCS, allowing fast and easy capacitance
measurements from femtoFarads (fF) to nanoFarads (nF), at frequencies
from 10kHz to 10MHz. Developed with the most modern and high
performance circuitry available, the Model 4200-CVU has eight patents
pending on its innovative design. This design provides intuitive
point-and-click setup, simple cabling, and built-in element models that
eliminate the guesswork in obtaining valid C-V measurements. Users of
all experience levels can perform C-V tests as if they were experts.
The Model 4200-CVU includes the most extensive set of test
libraries available, greatly increasing test efficiency. Even more
efficiency is possible with Keithley's Model 4200-LS-LC-12, a special
switch matrix and card with cables and adapters that enable tightly
integrated C-V/I-V testing with a single prober touchdown. The optional
Model 4200-PROBER-KIT allows easy connection of the Model 4200-SCS to
the most widely used probers. The net result is comprehensive C-V
testing that is as easy to set up and run as I-V tests.
Broad Application Support
With these latest additions to its 4200-SCS line, Keithley has
taken the lead in C-V instrumentation and now satisfies the widest
range of applications served by a single semiconductor test instrument,
covering a broad array of probers, device types, process technologies,
and measurement methodologies – including pulse I-V. The
Model 4200-CVU and optional modules solve the problems of other
characterization systems that either do not provide integrated
C-V/I-V/pulse, or have limited support in their user interfaces and
software libraries. Moreover, the system's flexible and powerful test
execution engine makes it simple to combine I-V, C-V, and pulsed tests
into the same test sequence. Therefore, the Model 4200-SCS can replace
a variety of electrical test tools with a single, tightly integrated
characterization solution. Nonetheless, Keithley's Model 4200-SCS will
continue to support C-V/I-V/pulse and other test methodologies
utilizing a variety of third party instruments. These characteristics
make the 4200-SCS/CVU solution the ideal choice for:
- Semiconductor technology development/process
development/reliability labs
- Materials and device research labs and consortia
- Any lab needing a benchtop DC or pulse instrument
- Most semi labs and users needing
multi-use/multi-instruments in a small form factor
Powerful Software. The Model 4200-SCS has always had the most
intuitive Windows-based interface (GUI) of any semiconductor
characterization system on the market. Developed from many years of
customer interaction and feedback, this ease of use continues with the
new Model 4200-CVU hardware and software modules, which are a natural
extension of its interactive test environment and execution engine.
Keithley supports the Model 4200-CVU hardware with an extensive set of
sample programs, test libraries, and built-in parameter extraction
examples ready to run right out of the box. The eight software
libraries provide the broadest range of C-V test and analysis
available. They cover all the standard applications, including C-V,
C-t, and C-f measurement and analysis for high and low K structures,
MOSFETs, BJTs, diodes, flash memory, photovoltaic cells, III-V compound
devices, and carbon nanotube (CNT) devices. Besides junction,
pin-to-pin, and interconnect capacitance, the analysis and parameter
extraction software yields doping profiles, TOX, mobile ions, and
carrier lifetime. These tests include various linear and custom C-V
sweeps, as well as C vs. time and C vs. frequency.
Unlike other characterization systems, the Keithley C-V/I-V
analysis and extraction programs operate in a well-documented open
environment, allowing users to easily make modifications and customize
their routines. Integrated sample projects, developed from the deep
application knowledge of Keithley engineers, help shorten program
development time.
The Model 4200-CVU also comes with a variety of advanced
diagnostic tools to help ensure the validity of C-V test results.
Uncertain if a test result is accurate? Just click the on-screen
"Confidence Check" button, or use the real-time front panel to isolate
portions of the test setup for validation.
The well proven capabilities of the Model 4200-SCS provide the
best user experience with the shortest learning curve. It solves the
problems faced by semiconductor lab managers when striving to increase
productivity and efficiency in device characterization and modeling.
Designed for Higher
Throughput
Much of the credit for the Model 4200-CVU's exceptional
measurement accuracy, speed, and efficiency is due to the Model
4200-SCS's high speed digital measurement hardware and tight hardware
and software integration, as well as Keithley's adherence to low-noise
system design principles. This combination of strengths means the Model
4200-CVU can improve users' productivity significantly, whether the
task is as simple as setting up a single measurement or running a
preset test sequence with a single mouse-click, or as sophisticated as
triggering and plotting multiple C-V sweeps. The system's high speed
digital architecture means the Model 4200-CVU can run and plot C-V
sweeps in real time faster than any competitive C-V meter.
Highly Versatile Test
Environment
In addition to I-V/C-V/pulse testing in one flexible, fully
integrated test environment, Model 4200-SCS users have several other
options. These include a choice of up to eight medium- or high-power DC
source-measure units (SMUs), dual-channel pulse and waveform
generators, and an integrated digital oscilloscope. Like the Model
4200-CVU, all of these instruments plug into the Model 4200-SCS
instrument slots and are controlled by the powerful Keithley Test
Environment Interactive (KTEI, version 7.0) software environment. This
point-and-click interface streamlines test setup, test sequence
control, and data analysis. KTEI can also control a variety of external
instruments, including most probers, hot chucks, and test fixtures, as
well as Keithley's high integrity switch matrices, which provide the
widest connection flexibility available in the industry.
Obsolescence Protection
Many instrument manufacturers produce a continuous stream of
products that are not compatible with each other, and a new product
often signals the end of a previous offering – leaving no
investment protection. Keithley's policy of continual hardware and
software upgrades to the Model 4200-SCS means that the Model 4200-CVU
module, along with all associated software and optional hardware, can
be retrofitted to the first Model 4200-SCS ever built. This easy
upgrade path eliminates the need to buy a new parametric analyzer every
few years to keep pace with innovations in device or materials
technology. Systems can be upgraded cost-effectively to keep up with
the industry's evolving test needs, so capital investments in the Model
4200-SCS stretch much further than in competitive test solutions.
Furthermore, external hardware and test program development is held to
a minimum.