Technology, Inc., a developer and manufacturer of specialized
short-wavelength light products for advanced technology applications,
will introduce a revolutionary technology at the 2008 SPIE Advanced
Lithography Conference, February 26-27, that enables light sources to
achieve extreme high brightness and power over the broadest spectral
range. The LDLS(TM) Laser-Driven Light Source is embodied in the
EQ-1000, the first in a series of user-friendly, compact light products
that can be used in a variety of applications. The EQ-1000 can be
configured for broad spectrum output in spectroscopy, biological
imaging, and general scientific research, or for specific narrow band
spectral output, such as 193nm for photoresist testing.
A single EQ-1000 LDLS Laser-Driven Light Source covers
wavelengths from 170nm to beyond visible, while attaining exceptional
bright light and power at levels that exceed those of deuterium lamps
and at a fraction of the cost of excimer or other DUV lasers. The fully
integrated EQ-1000, which incorporates light collection optics and a
power supply, offers a choice of narrow-band or broadband optical
output, allowing flexibility for customers needing a long- life, high
brightness, narrow or broadband light source at an economical price.
"LDLS technology is our newest innovation in advanced light
source products that enable the production of the world's next
generation nano-scale devices," said Paul Blackborow, CEO of Energetiq.
"Building upon our expertise in reliable high brightness EUV and high
power DUV light source science, we're thrilled to offer this
ground-breaking technology that allows for such a superior level of
brightness over a very broad spectral range. This technology is
embodied in our EQ-1000 LDLS Laser-Driven Light Source, the world's
first source of truly broadband DUV-VIS power. Now, researchers who
need high brightness, high power UV light can use a single UV-VIS
source, giving them a cost-effective alternative to purchasing and
operating multiple lamps or lasers."
The compact EQ-1000 integrates easily into process tools and
analytical instruments. It uses a sealed Xenon gas bulb,
unlike excimer lasers that require the installation of toxic gases. The
proprietary laser-driven bulb technology is optimized for superior
brightness and long operating life.