New Type of High Brightness, Continuous Spectrum Light Sources to be Used in Spectroscopy, Biological Imaging, Scientific Research or Photoresist Testing

Published on February 21, 2008 at 11:30 AM

Energetiq Technology, Inc., a developer and manufacturer of specialized short-wavelength light products for advanced technology applications, will introduce a revolutionary technology at the 2008 SPIE Advanced Lithography Conference, February 26-27, that enables light sources to achieve extreme high brightness and power over the broadest spectral range. The LDLS(TM) Laser-Driven Light Source is embodied in the EQ-1000, the first in a series of user-friendly, compact light products that can be used in a variety of applications. The EQ-1000 can be configured for broad spectrum output in spectroscopy, biological imaging, and general scientific research, or for specific narrow band spectral output, such as 193nm for photoresist testing.

A single EQ-1000 LDLS Laser-Driven Light Source covers wavelengths from 170nm to beyond visible, while attaining exceptional bright light and power at levels that exceed those of deuterium lamps and at a fraction of the cost of excimer or other DUV lasers. The fully integrated EQ-1000, which incorporates light collection optics and a power supply, offers a choice of narrow-band or broadband optical output, allowing flexibility for customers needing a long- life, high brightness, narrow or broadband light source at an economical price.

"LDLS technology is our newest innovation in advanced light source products that enable the production of the world's next generation nano-scale devices," said Paul Blackborow, CEO of Energetiq. "Building upon our expertise in reliable high brightness EUV and high power DUV light source science, we're thrilled to offer this ground-breaking technology that allows for such a superior level of brightness over a very broad spectral range. This technology is embodied in our EQ-1000 LDLS Laser-Driven Light Source, the world's first source of truly broadband DUV-VIS power. Now, researchers who need high brightness, high power UV light can use a single UV-VIS source, giving them a cost-effective alternative to purchasing and operating multiple lamps or lasers."

The compact EQ-1000 integrates easily into process tools and analytical instruments.  It uses a sealed Xenon gas bulb, unlike excimer lasers that require the installation of toxic gases. The proprietary laser-driven bulb technology is optimized for superior brightness and long operating life.

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