To enable the production of highly polished TEM lamellas Carl
Zeiss SMT now offers an additional Argon ion beam column to its successful
NVison 40 CrossBeam workstation.
Highly polished TEM lamellas are a prerequisite for successful analysis of
specimens in a transmission electron microscope. The new low- energy Argon ion
column in the NVision 40 CrossBeam workstation allows the fabrication of supreme
sample quality by enabling almost complete removal of surface damages, that
typically occur during the initial FIB milling steps. With this “supreme
milling” method unprecedented TEM lamella quality is achieved enabling
quantitative atomic resolution characterization of samples. By employing the
new triple beam technology, time consuming and cost-intensive additional polishing
processes in auxiliary tools become obsolete.
Two dedicated products
The new NVision 40 Argon will be available in two dedicated models:
- a process oriented high throughput version dedicated to routine TEM sample
preparation for semiconductor customers;
- a multi purpose versatile version for highest demands in processing and
analytics applications in materials science and the semiconductor semiconductor
The Argon ion column is retrofittable to existing NVision 40 workstations.
NVision 40 Argon is a joint product of Carl Zeiss SMT– Nano Technology
System division and its Japanese partner SII Nano Technology.