Rudolph Technologies,
Inc., a worldwide leader in process characterization solutions for the semiconductor
manufacturing industry, today announced the receipt of orders from a major European
semiconductor manufacturer for two WaferWoRx 300 Probing Process Analysis
Systems. The orders were placed as part of a multi-tool agreement signed in
June 2008.
The WaferWoRx 300 System allows semiconductor manufacturers to make informed
decisions based on quantifiable data about their wafer probing process in order
to increase yields and reduce operating costs. Rudolph’s Probe Card Test
and Analysis product manager, Darren James, stated, “We are continually
seeking opportunities to reduce the cost and complexity of wafer probing and
other final test processes. With today’s multi-site, multiple test probe
processes, determining the root cause of yield loss is a challenge for our customers.
The WaferWoRx generates analyses that helps pin-point the most likely source
of probing process problems.”
The WaferWoRx 300 is a probing process analysis system that uncovers potential
process problems and defines practical solutions based on data from individual
probe tips and scrub marks, and on the detection and analysis of larger-scale
patterns within the aggregated data. Using automated analysis from WaferWoRx,
test engineers can evaluate the stage accuracy, performance under load and test
at temperature characteristics of the prober. They can prequalify test cells
without risk to production wafers and evaluate the readiness of the probing
process for advanced technologies such as multi-DUT and high pin count probe
cards. In addition, probe card performance can be tracked to predict the need
for maintenance. This step is designed to extend card life and maximize card
availability while avoiding the yield losses that can occur when a card fails
during use.
“This is a significant sale for an important product recently added to
Rudolph’s back-end portfolio,” James said. “We are investing
heavily in these products and technologies; we believe they will enable our
customers to improve their operating performance and allow us to maintain our
position as the leading supplier of backend inspection, metrology and process
control solutions.”
Data generated by the WaferWoRx 300 can produce quantifiable benefits by reducing
yield losses in the probing process and increase the lifetime and availability
of expensive consumables, such as probe cards.