Jobin Yvon is pleased to announce the unique Auto SE as the winner of the
2008 IC Industry New System Award.
The AutoSE from Horiba Jobin Yvon.
The IC Industry Awards are a recognised platform that allows the semiconductor
industry to judge the products and practices serving the industry.
The new Auto SE is the only simple, integrated spectroscopic ellipsometer solution
for determining the thicknesses and optical constants of thin layers and multi
This new thin film measurement tool has been designed to fulfil thin film
quality control requirements. It provides full automation (loading, alignment,
mapping), automated selection of 8 different spot sizes down to 25x60 µm
and a unique integrated vision system. It is controlled by the intuitive Auto
Soft software that enables push button thin film analysis for routine operation,
with advanced engineering and service modes available for characterising new
“We believe that the Auto SE is a major turning point for spectroscopic
ellipsometry as it provides accurate thin film quality control very quickly
and simply. The unique imaging capability of the MyAutoView vision system shows
exactly where the measurement spot is placed, so it is ideal for characterising
patterned samples. We are proud to receive this award on behalf of the Thin
Film Division as the Auto SE is the result of the continuous efforts of all
thin film staff members” said Denis Cattelan, Director of HORIBA Jobin
Yvon Thin Film Division.