Heidelberg Instruments announced the sale of a uPG101 table top maskless laser
patterning system to the MacDiarmid Institute of the University of Canterbury,
New Zealand.
The µPG101 is an extremely economical and easy to use Micro Pattern Generator
for direct write applications as well as low volume mask making. It is also
perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates
up to 4 inches by 4 inches, and is capable of exposing high resolution features
with an address grid of 100nm.
"The µPG101 system installed at the University of Canterbury will
be used to support the research of New
Zealand's MacDiarmid Institute for Advanced Materials and Nanotechnology.
It is an ideal mask-making and device-prototyping tool to support the wide range
of research being carried out, from exploring new applications for microfluidic
systems, to developing optoelectronic and spintronic devices from a range of
different organic and inorganic materials," states Professor Richard Blaikie,
Deputy Director at the MacDiarmid Institute.
The µPG101 maskless lithography system offers a very small footprint
of 60cm by 60cm. It presents a highly flexible, out of the box tool which is
capable of layer to layer alignment through its integrated camera system. Applications
include MEMS, BioMEMS, Integrated Optics, Micro Fluidics, µTAS, or similar
areas requiring microstructures.