Inc. announced that one of its Vistec EBPG5000plus was accepted by the University
of Toronto (UofT). The Gaussian Beam Lithography System will offer a wide range
of application areas for the Faculty of Applied Science and Engineering and
the Emerging Communications Technology Institute at the Canadian University
The new EBPG5000plus system has been installed in the Wallberg Building at
St. George Campus, in downtown Toronto. Vistec's EBPG5000plus excels through
its flexibility and excellent lithography performance - a perfect fit
for the variety of applications required by the University. "This facility
is the first one of its kind in the province of Ontario and Western Canada.
The possibilities to grow out of this initiative dedicated to the field of nanoscale
science and engineering are almost limitless. This unique facility could be
the convergence point for researchers from a number of science and engineering
disciplines - demonstrating the versatility of the EBPG5000plus technology
and also the multidisciplinary nature of nanotechnology research. UofT now has
the technological capability to explore new design and fabrication possibilities
on the nanoscale for the next-generation devices - driven by high pattern
resolution and placement accuracy" says Dr. Aju Jugessur, Nanolithography
Facility Manager / Senior Researcher who is leading and developing this new
facility at the University of Toronto.
Applications that will benefit from the flexibility of the EBPG5000plus include:
meta-materials and photonic crystals, integrated optical devices, nanophotonic
devices, lab-on-chip devices, biosensors for medical applications and nano-patterning
for surface functionalization for fpr protein & DNA related biological work.
One immediate application plan will be academic mask making, which will allow
the University to write masks for internal use according to requirements. ECTI
also plans to offer its Electron Beam Lithography services to industrial users.
"The bandwidth of possible uses puts this Gaussian Beam Lithography System
on top of the competition", states Erwin Mueller, Vistec's Manager of Service
& Technical Support. Vistec's EBPG series is also a global leader for advanced
nanolithography applications, particularly in direct writing of premium GaAs
communication devices. The extraordinary flexibility of the EBPG5000plus to
support a wide range of different applications makes it the ideal system for
the manifold needs of the University of Toronto.